Effective suppression of surface leakage currents in T2SL photodetectors with deep and vertical mesa sidewalls via TMA and H-2 plasma combined pretreatment

Tan, B; Cheng, SF; Liu, B; Zhou, WH; Liu, YF; Zhang, CJ; Cao, SS; Ding, YY; Yang, ZC; Huang, L

Huang, L (corresponding author), Wuhan Guide Infrared Co Ltd, Huanglongshan South Rd,East Lake Dev Dist, Wuhan 430205, Peoples R China.

INFRARED PHYSICS & TECHNOLOGY, 2021; 116 ():

Abstract

For type-II InAs/GaSb superlattice (T2SL) photodetectors with deep and vertical mesa sidewalls, passivation for suppression of surface leakage current......

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