Sub-bandgap absorption and photo-response of molybdenum heavily doped black silicon fabricated by a femtosecond laser

Yang, Y; Zhao, JH; Li, C; Chen, QD; Chen, ZG; Sun, HB

Zhao, JH (corresponding author), Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China.

OPTICS LETTERS, 2021; 46 (13): 3300

Abstract

Molybdenum (Mo)-doped black silicon (Si) is obtained. by using femtosecond. laser irradiation. The concentration of Mo atoms at the depth from 10 to 2......

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