Improvement of in-plane uniformity of cathodoluminescence from ZnO luminescent layers for electron beam excitation assisted optical microscope

Nakamura, A; Inami, W; Yamamoto, R; Imai, Y; Kobayashi, S; Kawata, Y

Nakamura, A (corresponding author), Shizuoka Univ, Res Inst Elect, Hamamatsu, Shizuoka 4328011, Japan.; Nakamura, A (corresponding author), Shizuoka Univ, Grad Sch Integrated Sci & Technol, Hamamatsu, Shizuoka 4328011, Japan.

JAPANESE JOURNAL OF APPLIED PHYSICS, 2021; 60 (6):

Abstract

We fabricated flat and homogeneous Al2O3/ZnO/Al2O3 heterostructure luminescent layers by atomic layer deposition (ALD) to serve as a nanometer-scaled ......

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