Origins of epitaxial macro-terraces and macro-steps on GaN substrates

Liao, ME; Olsen, WL; Huynh, K; Luccioni, DP; Wang, YK; Huang, XR; Wojcik, MJ; Allerman, AA; Goorsky, MS

Liao, ME (通讯作者),Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA.;Liao, ME (通讯作者),US Naval Res Lab, Washington, DC 20375 USA.

JOURNAL OF APPLIED PHYSICS, 2023; 133 (18):

Abstract

Localized lattice distortions in GaN substrates can serve as nucleation sites for epitaxial macro-steps and macro-terraces. These detrimental macro-sc......

Full Text Link