Fabricating ZnSnN2 with cosputtering

Cai, XM; Wang, B; Ye, F; Zeng, JJ; Vaithinathan, K; Wang, F; Ma, XF; Xie, YZ; Zhang, DP; Fan, P; Roy, VAL

Ye, F (reprint author), Shenzhen Univ, Sch Phys & Energy, Shenzhen 518060, Peoples R China.; Ye, F (reprint author), Shenzhen Univ, Shenzhen Key Lab Adv Thin Films & Applicat, Shenzhen 518060, Peoples R China.

SURFACE & COATINGS TECHNOLOGY, 2019; 359 (): 169

Abstract

The deposition of ZnSnN2 by co-sputtering was studied systematically. Different deposition parameters, including substrate temperatures, N-2 flow rate......

Full Text Link


Links

期刊讨论 | 中国SCI论文 | 期刊主页 | 投稿经验 | 杂志官网 | 投稿链接 | 作者需知 | PMC链接 | Pubmed全文检索