Effects of driving frequency on plasma density in Ar and H-2/Ar capacitively coupled plasmas at Torr-order pressure

Denpoh, K

Denpoh, K (corresponding author), Tokyo Electron Technol Solut Ltd, Simulat Technol Dev Dept, 650 Mitsuzawa,Hosaka Cho, Nirasaki, Yamanashi 4070192, Japan.

JAPANESE JOURNAL OF APPLIED PHYSICS, 2021; 60 (1):

Abstract

Effects of driving frequency on the plasma density in capacitively coupled plasmas (CCPs) have been investigated at Torr-order pressures which are com......

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