Piezoresistance in Defect-Engineered Silicon

Li, H; Thayil, A; Lew, CTK; Filoche, M; Johnson, BC; McCallum, JC; Arscott, S; Rowe, ACH

Rowe, ACH (corresponding author), Ecole Polytech, CNRS, IP Paris, Lab Phys Matiere Condensee, F-91128 Palaiseau, France.

PHYSICAL REVIEW APPLIED, 2021; 15 (1):

Abstract

The steady-state, space-charge-limited piezoresistance (PZR) of defect-engineered, silicon-on-insulator device layers containing silicon divacancy def......

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