Computer controlled Micropositioning Stage for 3D MEMS Fabrication

Homayoun, V; Moghadam, RA; Koohsorkhi, J

Homayoun, V (reprint author), Univ Tehran, Fac New Sci & Technol, Tehran, Iran.

2017 25TH IRANIAN CONFERENCE ON ELECTRICAL ENGINEERING (ICEE), 2017; ( ): 476

Abstract

Micro Electro Mechanical Systems (MEMS) are widely used in different industries like automobile and cell phone industries. There are several processes......

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