Interface tomography of GaInAs/AlInAs quantum cascade laser active regions

Paysen, E; Schuett, S; Michler, S; Yang, QK; Aidam, R; Trampert, A

Paysen, E (通讯作者)，Leibniz Inst Forschungsverbund, Paul Drude Inst Festkorperelektron, Berlin, Germany.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2023; 38 (5):

Abstract

We present a high-resolution electron tomography study of buried ultra-thin layers and their interfaces from the active region of a (Ga,In)As/(Al,In)A......

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