High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry

Zhao, DG; Jia, CZ; Ma, YY; Yang, XF; Zhang, B; Chu, WB

Zhao, DG (corresponding author), North Univ China, Sch Informat & Commun Engn, Taiyuan 030051, Peoples R China.; Zhao, DG (corresponding author), North Univ China, Shanxi Prov Res Ctr Optoelect Informat & Instrume, Taiyuan 030051, Peoples R China.

INTERNATIONAL JOURNAL OF OPTICS, 2021; 2021 ():

Abstract

According to the principle of phase-shifting interferometry and spiral phase characteristics of the vortex beam, this article proposes a method for de......

Full Text Link