Long Trace Profiler for Measuring Groove Density of Diffraction Gratings

Wu, XP; Wei, HK; Liu, ZK; Qiu, KQ; Xu, XD; Hong, YL

Liu, ZK (corresponding author), Univ Sci & Technol China, Natl Synchrotron Radiat Lab, Hefei 230029, Anhui, Peoples R China.

ACTA OPTICA SINICA, 2021; 41 (6):

Abstract

Diffraction gratings are widely used in the soft X-ray and vacuum ultraviolet grating monochromators of the synchrotron radiation source, and thus the......

Full Text Link