A MEMS-Based Quad-Wavelength Hybrid Plasmonic-Pyroelectric Infrared Detector

Doan, AT; Yokoyama, T; Dao, TD; Ishii, S; Ohi, A; Nabatame, T; Wada, Y; Maruyama, S; Nagao, T

Nagao, T (reprint author), Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan.; Nagao, T (reprint author), Hokkaido Univ, Grad Sch Sci, Dept Condensed Matter Phys, Kita Ku, Kita 10 Nishi 8, Sapporo, Hokkaido 060081

MICROMACHINES, 2019; 10 (6):

Abstract

Spectrally selective detection is of crucial importance for diverse modern spectroscopic applications such as multi-wavelength pyrometry, non-dispersi......

Full Text Link