Electrostatically actuated encased cantilevers

Desbiolles, BXE; Furlan, G; Schwartzberg, AM; Ashby, PD; Ziegler, D

Ziegler, D (reprint author), Lawrence Berkeley Natl Lab, Mol Foundry, 1 Cyclotron Rd, Berkeley, CA 94720 USA.; Ziegler, D (reprint author), Scuba Probe Technol LLC, 255 Lina Ave, Alameda, CA 94501 USA.

BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2018; 9 (): 1381

Abstract

Background: Encased cantilevers are novel force sensors that overcome major limitations of liquid scanning probe microscopy. By trapping air inside an......

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