Active linearized PGC demodulation with fusion of PGC-Arctan and PGC-DCM schemes for nonlinear error elimination in SPM interferometer

Chen, BY; Jiang, JC; Lou, YT; Yan, LP

Lou, YT; Yan, LP (通讯作者),Zhejiang Sci Tech Univ, Precis Measurement Lab, Hangzhou 310018, Peoples R China.

OPTICS EXPRESS, 2022; 30 (13): 22999