Deterministic doping

Jamieson, DN; Lawrie, WIL; Robson, SG; Jakob, AM; Johnson, BC; McCallum, JC

Jamieson, DN (reprint author), Univ Melbourne, Sch Phys, ARC Ctr Quantum Computat & Commun Technol, Parkville, Vic 3010, Australia.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2017; 62 ( ): 23

Abstract

Emerging programs in a new field of technology that employs quantum mechanical principles in engineered devices has driven Pew approaches to atomic-sc......

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