RESONANT VARIFOCAL MEMS MIRROR

Kocer, S; Mukhangaliyeva, L; Saritas, R; Gulsaran, A; Elhady, A; Bell, K; Kamel, A; Basha, M; Das, T; Kayaharman, M; Hajireza, P; Yavuz, M; Abdel-Rahman, E

Kocer, S (通讯作者)，Univ Waterloo, Waterloo, ON, Canada.

2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), 2022; (): 963

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