Development of Sputter Epitaxy Technique of Pure-Perovskite (001)/(100)-Oriented Sm-Doped Pb(Mg < sub > 1/3 </sub >, Nb < sub > 2/3 </sub >)O < sub > 3 </sub > PbTiO < sub > 3 </sub > on Si

Qi, XM; Yoshida, S; Tanaka, S

Yoshida, S (corresponding author), Tohoku Univ, Grad Sch Engn, Div Mech Engn, Sendai, Miyagi 9808579, Japan.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2020; 67 (12): 2738

Abstract

We have developed a unique sputter deposition technique for a pure-perovskite (001)/(100)-oriented samarium-doped Pb(Mg1/3, Nb2/3)O3PbTiO3 (Sm-PMN-PT)......

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