Fabrication of Embedded Submicron Metal Lines on Glass Surfaces

Yu, HF; Xu, J; Zhang, AD; Cheng, Y

Xu, J (corresponding author), East China Normal Univ, State Key Lab Precis Spect, Shanghai 200241, Peoples R China.

CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG, 2020; 47 (5):

Abstract

In this study, a method for fabricating embedded submicron metal wires on glass surfaces is demonstrated. First, grooves with submicron linewidths wer......

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