Estimation of needle height using relative parallax between two SIM images in single-column focused ion beam instrument

Shichi, H; Tsuneta, R; Fukuda, M

Shichi, H (corresponding author), Hitachi Ltd, Res & Dev Grp, Kokubunji, Tokyo 1858601, Japan.

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2021; 67 (): 453

Abstract

Gallium liquid metal ion source focused ion beam (FIB) instruments are widely used for cross-sectional sample preparation of specific areas of interes......

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