Overlay Degradation Induced by Film Stress

Huang, CH; Liu, YL; Luo, SA; Yang, M; Yang, E; Hung, YT; Luoh, T; Yang, TH; Chen, KC

Huang, CH (reprint author), Macronix Int Co Ltd, Technol Dev Ctr, 16,Li Hsin Rd,Sci Pk, Hsinchu 300, Taiwan.

METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXI, 2017; 10145 ( ):