ITO/Ag Multilayer Films Fabricated by Low-Damaging Facing-Target Sputtering

Shin, KY; Kim, S; Rim, YS; Kim, KH

Kim, S; Kim, KH (reprint author), Gachon Univ, Dept Elect Engn, Seongnam 13120, South Korea.

SCIENCE OF ADVANCED MATERIALS, 2017; 9 (9): 1551