2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms

Wang, L; Hartmann, P; Donko, Z; Song, YH; Schulze, J

Song, YH (corresponding author), Dalian Univ Technol, Minist Educ, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China.

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2021; 30 (5):

Abstract

The effects of the simultaneous presence of two different types of plasma asymmetry, viz, geometric and electrical, on low-pressure capacitively coupl......

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