Adhesion in micromechanical systems

Bestugin, AR; Kirshina, IA; Ovodenko, AA; Oskolkov, BV; Filonov, OM

Bestugin, AR (reprint author), St Petersburg State Univ Aerosp Instrumentat, St Petersburg, Russia.

AUTOMATION AND REMOTE CONTROL, 2017; 78 (6): 1138

Abstract

In this paper adhesion is considered as a factor that to a large extent defines the reliability of technological processes in microelectromechanical s......

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