Toward areal chromatic confocal metrology

Prause, K; Herkommer, A; Layh, M

Prause, K (通讯作者),Univ Appl Sci Kempten, Lab Optic 3D Metrol & Comp Vis, Kempten, Germany.

OPTICAL ENGINEERING, 2023; 62 (3):

Abstract

Chromatic confocal metrology suffers from a limitation in the number of measurement points that can be measured simultaneously in a single frame acqui......

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