Effects of Y2O3-LaF3 on the low temperature sintering and thermal conductivity of AlN ceramics

Jiang, H; Lu, YY; Ding, LW; Lu, WZ; Fan, GF; Shi, YS

Fan, GF (reprint author), Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan, Hubei, Peoples R China.

MICROELECTRONICS INTERNATIONAL, 2019; 36 (1): 22

Abstract

Purpose Aluminum nitride (AlN) ceramics are suitable substrate and package materials for high-power integrated circuits. Design/methodology/approach D......

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