Electron beam-induced deposition of platinum from Pt(CO)(2)Cl-2 and Pt(CO)(2)Br-2

Mahgoub, A; Lu, H; Thorman, RM; Preradovic, K; Jurca, T; McElwee-White, L; Fairbrother, H; Hagen, CW

Mahgoub, A (corresponding author), Delft Univ Technol, Fac Sci Appl, Dept Imaging Phys, Lorentzweg 1, NL-2628 CJ Delft, Netherlands.

BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2020; 11 (): 1789

Abstract

Two platinum precursors, Pt(CO)(2)Cl-2 and Pt(CO)(2)Br-2, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing......

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