Plasma etching of wide bandgap and ultrawide bandgap semiconductors

Pearton, SJ; Douglas, EA; Shul, RJ; Ren, F

Pearton, SJ (corresponding author), Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2020; 38 (2):