Review-RF Sputtered Films of Ga2O3

Saikumar, AK; Nehate, SD; Sundaram, KB

Saikumar, AK (reprint author), Univ Cent Florida, Dept Elect & Comp Engn, Orlando, FL 32816 USA.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2019; 8 (7): Q3064

Abstract

Ga2O3 has been a subject of interest in research field with varying applications for current and future generation electronic devices. Due to its ultr......

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