Subwavelength interference nanolithography based on metallic-insulator-metallic waveguide with a trapezoid metallic nanoslit coupler

Zhang, SX; Yang, XF; Yu, WY; Wang, BJ; Cai, XL; Zhang, LW; Li, XH; Jia, XT; Wang, J; Zhao, XX

Yang, XF (reprint author), Henan Polytech Univ, Sch Phys & Elect Informat Engn, Jiaozuo, Henan, Peoples R China.

JOURNAL OF NANOPHOTONICS, 2019; 13 (2):

Abstract

A subwavelength interference nanolithography scheme is numerically demonstrated based on a metallic-insulator-metallic waveguide combined with unidire......

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