Heterogeneous MOS microring resonators

Huang, X; Liang, D; Zhang, C; Kurczveil, G; Li, XM; Zhang, JM; Fiorentino, M; Beausoleil, R

Liang, D (reprint author), Hewlett Packard Enterprise, Hewlett Packard Labs, Large Scale Integrated Photon Grp, Palo Alto, CA 94304 USA.

30TH ANNUAL CONFERENCE OF THE IEEE PHOTONICS SOCIETY (IPC), 2017; ( ): 121

Abstract

We demonstrate a heterogeneous microring resonator with integrated InP-dielectric-Si metal-oxide-semiconductor (MOS) capacitor by high-k dielectric wa......

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