Analysis of the Spatial-Frequency Characteristics of the Photo-Assisted Method of a Quartz Rough Surface Nano-Polishing

Kanevskii, V; Kolienov, S; Grygoruk, V; Stelmakh, O; Zhang, H

Zhang, H (corresponding author), Beijing Inst Technol, Beijing 100081, Peoples R China.

INTERNATIONAL JOURNAL OF OPTICS, 2021; 2021 ():