Atom-by-atom fabrication with electron beams

Dyck, O; Ziatdinov, M; Lingerfelt, DB; Unocic, RR; HudaK, BM; Lupini, AR; Jesse, S; Kalinin, SV

Dyck, O (reprint author), Oak Ridge Natl Lab, Ctr Nanophase Mat Sci, Oak Ridge, TN 37830 USA.

NATURE REVIEWS MATERIALS, 2019; 4 (7): 497

Abstract

Assembling matter atom-by-atom into functional devices is the ultimate goal of nanotechnology. The possibility of achieving this goal is intrinsically......

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