Modeling Collinear WATs for Parametric Yield Enhancement in Semiconductor Manufacturing

Chien, CF; Lee, PC; Dou, RL; Chen, YJ; Chen, CC

Chien, CF (reprint author), Natl Tsing Hua Univ, Dept Ind Engn & Engn Management, Hsinchu, Taiwan.

2017 13TH IEEE CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING (CASE), 2017; ( ): 739

Abstract

Yield enhancement is one of the major objectives for semiconductor manufacturing. In addition to the usual functional yield that needs to achieve a mu......

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