Microwave Resistivity of Thermally Oxidized High Resistivity Silicon Wafers

Judek, J; Zdrojek, M; Szmigiel, D; Krupka, J

Zdrojek, M (reprint author), Warsaw Univ Technol, Fac Phys, Koszykowa 75, PL-00662 Warsaw, Poland.

JOURNAL OF ELECTRONIC MATERIALS, 2017; 46 (10): 5589

Abstract

We used a microwave dielectric resonator to study how the process of thermal oxidation of high resistivity silicon wafers reduces the wafer microwave ......

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