Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments

Shen, XY; Zhou, SN; Li, DS

Shen, XY (corresponding author), China Jiliang Univ, Coll Met & Measurement Engn, Hangzhou 310018, Zhejiang, Peoples R China.

SENSORS, 2021; 21 (11):