Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N-2 mixtures

Korolov, I; Donko, Z; Hubner, G; Liu, Y; Mussenbrock, T; Schulze, J

Korolov, I (corresponding author), Ruhr Univ Bochum, Dept Elect Engn & Informat Sci, D-44780 Bochum, Germany.

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2021; 30 (9):

Abstract

Based on tunable diode laser absorption spectroscopy (TDLAS) measurements of the spatially averaged and peak helium metastable atom densities in a cap......

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