Chip-scale optical airflow sensor-MedSci.cn

Chip-scale optical airflow sensor

Luo, YM; An, XS; Chen, L; Li, KH

Li, KH (通讯作者)，Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China.;Li, KH (通讯作者)，Southern Univ Sci & Technol, Engn Res Ctr Integrated Circuits Next Generat Com, Minist Educ, Shenzhen 518055, Peoples R China.;Li, KH (通讯作者)，Southern Univ Sci & Technol, Engn Res Ctr Three Dimens Integrat Guangdong Prov, Shenzhen 518055, Peoples R China.