Epitaxial Growth and Solar-Blind Photoelectric Characteristic of Ga2O3 Film on Various Oriented Sapphire Substrates by Plasma-Enhanced Chemical Vapor Deposition

Hu, HZ; Wu, C; Zhao, NI; Zhu, ZY; Li, PG; Wang, SL; Tang, WH; Guo, DY

Zhu, ZY; Wang, SL; Guo, DY (corresponding author), Zhejiang Sci Tech Univ, Ctr Optoelect Mat & Devices, Hangzhou 310018, Peoples R China.; Zhu, ZY; Wang, SL; Guo, DY (corresponding author), Zhejiang Sci Tech Univ, Key Lab Opt Field Manipulat Zhejiang Prov, Dept Phys, Hangzhou 310018, Peoples R China.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2021; 218 (11):

Abstract

The epitaxial growth of Ga2O3 thin films is important for their applications in electronic and optoelectronic devices. Herein, the growth of Ga2O3 thi......

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