Reciprocating Arc Silicon Strain Gauges

Han, JH; Min, SJ; Kim, JH; Min, NK

Kim, JH (通讯作者),Pusan Natl Univ, Dept Nanomechatron Engn, Busan 46241, South Korea.;Min, NK (通讯作者),Korea Univ, Dept Electromech Syst Engn, Sejong 30019, South Korea.

SENSORS, 2023; 23 (3):

Abstract

Currently, silicon-strain-gauge-based diaphragm pressure sensors use four single-gauge chips for high-output sensitivity. However, the four-single-gau......

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