Tri-axial optical MEMS accelerometer enables monolithic fabrication

Abozyd, S; Toraya, A; Gaber, N

Gaber, N (通讯作者)，Zewail City Sci & Technol, Ctr Nanotechnol, Giza 12578, Egypt.

MOEMS AND MINIATURIZED SYSTEMS XXI, 2022; 12013 ():

Abstract

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