PATTERNING VERTICAL SIDEWALL USING STANDARD ALIGNER

Wasa, K; Saito, S; Sahara, F; Sasaki, M

Sasaki, M (reprint author), Toyota Technol Inst, Nagoya, Aichi, Japan.

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018; (): 475

Abstract

A novel method for patterning the vertical sides all is proposed. The film. which consists of polyvinyl alcohol (PVA) and photoresist layers, is newly......

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