Performance Comparison of SONOS-Type UV TD Sensor Using Indium Tin Oxide-Aluminum Oxide-Zirconia Aluminum Oxide-Silicon Oxide-Silicon and Indium Tin Oxide-Aluminum Oxide-Hafnium Aluminum Oxide-Silicon Oxide-Silicon

Jong, FC; Hsieh, WC

Jong, FC (通讯作者),Southern Taiwan Univ Sci & Technol, Elect Engn Dept, Nan Tai St, Tainan 71005, Taiwan.;Hsieh, WC (通讯作者),Minghsin Univ Sci & Technol, Optoelect Syst Engn Dept, Xinfeng 30401, Taiwan.

CRYSTALS, 2023; 13 (7):

Abstract

This study compares the performance of two types of capacitive devices, indium tin oxide-aluminum oxide-zirconia aluminum oxide-silicon oxide-silicon ......

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