Effect of Benzotriazole and 5-Methyl/1-H Carboxyl Benzotriazole on Chemical Mechanical Polishing of Cobalt in H2O2 Based Slurry

Lei, SS; Wang, SL; Li, HL; Wang, CW; Yang, YDA; Cheng, YS; Li, S

Wang, SL (corresponding author), Hebei Univ Technol, Sch Elect Informat Engn, Tianjin 300130, Peoples R China.; Wang, SL (corresponding author), Tianjin Key Lab Elect Mat & Devices, Tianjin 300130, Peoples R China.

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2021; 10 (7):

Abstract

In this study, the passivation mechanism of three azole inhibitors with different functional groups, benzotriazole (BTA), 5-methyl-benzotriazole (TTA)......

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