Microsphere-assisted interference microscopy for resolution enhancement

Huser, L; Lehmann, P

Huser, L (corresponding author), Univ Kassel, Dept Elect Engn & Comp Sci, Measurement Technol Grp, Wilhelmshoher Allee 71, D-34121 Kassel, Germany.

TM-TECHNISCHES MESSEN, 2021; 88 (5): 311

Abstract

In order to push the limitations of optical measurement technology further and to measure finer structures, various systems have been published in cur......

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