Black silicon integrated aperture

Liu, T; Dickensheets, DL

Liu, T (reprint author), Montana State Univ, Dept Elect & Comp Engn, Bozeman, MT 59717 USA.

JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2017; 16 (4):

Abstract

This paper describes the incorporation of nanotextured black silicon as an optical absorbing material into silicon-based micro-optoelectromechanical s......

Full Text Link