Pull-in dynamics of overdamped microbeams

Gomez, M; Vella, D; Moulton, DE

Moulton, DE (reprint author), Univ Oxford, Math Inst, Woodstock Rd, Oxford OX2 6GG, England.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2018; 28 (11):

Abstract

We study the dynamics of MEMS microbeams undergoing electrostatic pull-in. At DC voltages close to the pull-in voltage, experiments and numerical simu......

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