A Novel Decoupled Flexure Nanopositioner With Thermal Distortion Self-Elimination Function

Jia, YJ; Tang, H; Xu, SF; Xu, Y; Chen, X; Tian, YL

Tang, H; Chen, X (通讯作者)，Guangdong Univ Technol, Guangdong Prov Key Lab Comp Integrated Mfg, State Key Lab Precis Elect Mfg Technol & Equipmen, Guangzhou 510006, Peoples R China.

IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2022; 27 (5): 2953

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