H2S MEMS-based gas sensor

Elshenety, A; El-Kholy, EE; Abdou, AF; Soliman, M; Elhagry, MM; Gado, WS

Elshenety, A (reprint author), Elect Res Inst, Dept Power Elect, Giza, Egypt.

JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2019; 18 (2):