MicroLED chromatic confocal microscope

Li, SB; Song, BF; Peterson, T; Hsu, J; Liang, RG

Liang, RG (corresponding author), Univ Arizona, James C Wyant Coll Opt Sci, 1630 E Univ Blvd, Tucson, AZ 85721 USA.

OPTICS LETTERS, 2021; 46 (11): 2722

Abstract

In this Letter, a microLED-based chromatic confocal microscope with a virtual confocal slit is proposed and demonstrated for three-dimensional (3D) pr......

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