3D-MSM AlN Deep Ultraviolet Detector

Li, T; Song, WQ; Wan, RQ; Zhang, L; Yan, JC; Zhu, WH; Wang, LC

Zhu, WH; Wang, LC (corresponding author), Cent South Univ, Coll Mech & Elect Engn, State Key Lab High Performance Complex Mfg, Changsha 410083, Peoples R China.

IEEE JOURNAL OF QUANTUM ELECTRONICS, 2021; 57 (3):

Abstract

Ultraviolet detectors are widely used in space exploration, military affairs, and disinfection. To further improve the responsivity and response time,......

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